Optical Physics for Nanolithography
indgår i Press Monographs serien
- Indbinding:
- Paperback
- Sideantal:
- 352
- Udgivet:
- 30. Maj 2018
- Størrelse:
- 152x229x0 mm.
Leveringstid:
Ukendt - mangler pt.
Beskrivelse af Optical Physics for Nanolithography
Provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps.
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