- Indbinding:
- Paperback
- Sideantal:
- 374
- Udgivet:
- 30. April 2021
- Størrelse:
- 255x178x24 mm.
- Vægt:
- 682 g.
Leveringstid:
Ukendt - mangler pt.
Beskrivelse af Optical and EUV Lithography
Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.
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