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Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect

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This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9789811061646
  • Indbinding:
  • Hardback
  • Sideantal:
  • 137
  • Udgivet:
  • 18. september 2017
  • Udgave:
  • 12018
  • Vægt:
  • 3613 g.
  • 8-11 hverdage.
  • 6. december 2024

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This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.

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