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Fundamental Principles of Optical Lithography

- The Science of Microfabrication

af Chris (Lithoguru.com) Mack
Fundamental Principles of Optical Lithography af Chris (Lithoguru.com) Mack
Bag om Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780470727300
  • Indbinding:
  • Paperback
  • Sideantal:
  • 544
  • Udgivet:
  • 16. november 2007
  • Størrelse:
  • 247x174x29 mm.
  • Vægt:
  • 916 g.
  • 8-11 hverdage.
  • 23. november 2024

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- Rabat på køb af fysiske bøger
- 1 valgfrit digitalt ugeblad
- 20 timers lytning og læsning
- Adgang til 70.000+ titler
- Ingen binding

Abonnementet koster 75 kr./md.
Ingen binding og kan opsiges når som helst.

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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