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Fundamental Principles of Optical Lithography

- The Science of Microfabrication

af Chris (Lithoguru.com) Mack
Fundamental Principles of Optical Lithography af Chris (Lithoguru.com) Mack
Bag om Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780470018934
  • Indbinding:
  • Hardback
  • Sideantal:
  • 544
  • Udgivet:
  • 16. november 2007
  • Størrelse:
  • 171x249x37 mm.
  • Vægt:
  • 1140 g.
Leveringstid: Ukendt - mangler pt.

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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