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Sputtering by Particle Bombardment III

- Characteristics of Sputtered Particles, Technical Applications

indgår i Topics in Applied Physics serien

Sputtering by Particle Bombardment III
Bag om Sputtering by Particle Bombardment III

Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783662311042
  • Indbinding:
  • Paperback
  • Sideantal:
  • 415
  • Udgivet:
  • 20. september 2013
  • Udgave:
  • 11991
  • Størrelse:
  • 235x155x23 mm.
  • Vægt:
  • 664 g.
  • 8-11 hverdage.
  • 11. december 2024
Forlænget returret til d. 31. januar 2025

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Beskrivelse af Sputtering by Particle Bombardment III

Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering.

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