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Simulation of Deposition Processes with PECVD Apparatus

Bag om Simulation of Deposition Processes with PECVD Apparatus

Discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) processes. This title presents underlying hierarchy of models for low-temperature and low-pressure plasma in order to discuss the processes that can be used to implant or deposit thin layers of important materials.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781621003656
  • Indbinding:
  • Hardback
  • Sideantal:
  • 144
  • Udgivet:
  • 1. januar 2012
  • Størrelse:
  • 162x234x14 mm.
  • Vægt:
  • 352 g.
  • Ukendt - mangler pt..

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Discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) processes. This title presents underlying hierarchy of models for low-temperature and low-pressure plasma in order to discuss the processes that can be used to implant or deposit thin layers of important materials.

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