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Silicon Carbide Microelectromechanical Systems For Harsh Environments

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Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781860946240
  • Indbinding:
  • Hardback
  • Sideantal:
  • 192
  • Udgivet:
  • 30. juni 2006
  • Størrelse:
  • 164x233x20 mm.
  • Vægt:
  • 482 g.
  • Ukendt - mangler pt..
Forlænget returret til d. 31. januar 2025

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- Adgang til 70.000+ titler
- Ingen binding

Abonnementet koster 75 kr./md.
Ingen binding og kan opsiges når som helst.

Beskrivelse af Silicon Carbide Microelectromechanical Systems For Harsh Environments

Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.

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