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Rapid Thermal Processing of Semiconductors

Bag om Rapid Thermal Processing of Semiconductors

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781489918062
  • Indbinding:
  • Paperback
  • Sideantal:
  • 358
  • Udgivet:
  • 20. juni 2013
  • Udgave:
  • 11997
  • Størrelse:
  • 234x156x20 mm.
  • Vægt:
  • 587 g.
  • 8-11 hverdage.
  • 10. december 2024

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Beskrivelse af Rapid Thermal Processing of Semiconductors

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

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