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Planar Waveguide Optical Sensors

- From Theory to Applications

Bag om Planar Waveguide Optical Sensors

This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783319817347
  • Indbinding:
  • Paperback
  • Sideantal:
  • 179
  • Udgivet:
  • 22. april 2018
  • Udgave:
  • 12016
  • Størrelse:
  • 155x235x0 mm.
  • Vægt:
  • 3226 g.
  • 8-11 hverdage.
  • 29. november 2024
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This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.

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