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Piezoelectric MEMS Resonators

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783319286860
  • Indbinding:
  • Hardback
  • Sideantal:
  • 424
  • Udgivet:
  • 18. januar 2017
  • Udgave:
  • 12017
  • Størrelse:
  • 246x166x30 mm.
  • Vægt:
  • 816 g.
  • 8-11 hverdage.
  • 29. januar 2025

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Beskrivelse af Piezoelectric MEMS Resonators

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.

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