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Physics of Submicron Lithography

af Kamil A. Valiev

indgår i Microdevices serien

Physics of Submicron Lithography af Kamil A. Valiev
Bag om Physics of Submicron Lithography

In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780306435782
  • Indbinding:
  • Hardback
  • Sideantal:
  • 493
  • Udgivet:
  • 31. marts 1992
  • Udgave:
  • 1992
  • Størrelse:
  • 254x178x25 mm.
  • Vægt:
  • 2600 g.
  • 8-11 hverdage.
  • 10. december 2024

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Beskrivelse af Physics of Submicron Lithography

In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

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