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Micromachined Ultrasound-Based Proximity Sensors

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Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780792385080
  • Indbinding:
  • Hardback
  • Sideantal:
  • 121
  • Udgivet:
  • 30. april 1999
  • Udgave:
  • 1999
  • Størrelse:
  • 234x156x9 mm.
  • Vægt:
  • 830 g.
  • 8-11 hverdage.
  • 9. december 2024

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Beskrivelse af Micromachined Ultrasound-Based Proximity Sensors

Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.

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