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MEMS Silicon Oscillating Accelerometers and Readout Circuits

indgår i River Publishers Series in Circuits and Systems serien

MEMS Silicon Oscillating Accelerometers and Readout Circuits
Bag om MEMS Silicon Oscillating Accelerometers and Readout Circuits

Covers both MEMS sensor and readout circuit, and provides in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but will also appeal to those who have general interests in MEMS inertial sensors.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9788770220453
  • Indbinding:
  • Hardback
  • Sideantal:
  • 312
  • Udgivet:
  • 30. november 2018
  • Størrelse:
  • 164x240x26 mm.
  • Vægt:
  • 630 g.
  • 8-11 hverdage.
  • 7. december 2024

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Beskrivelse af MEMS Silicon Oscillating Accelerometers and Readout Circuits

Covers both MEMS sensor and readout circuit, and provides in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but will also appeal to those who have general interests in MEMS inertial sensors.

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