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Mechanical Properties of Silicon Based Compounds: Silicides

af Joshua Pelleg

indgår i Engineering Materials serien

Mechanical Properties of Silicon Based Compounds: Silicides af Joshua Pelleg
Bag om Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783030225971
  • Indbinding:
  • Hardback
  • Sideantal:
  • 274
  • Udgivet:
  • 30. juli 2019
  • Udgave:
  • 12019
  • Vægt:
  • 606 g.
  • 8-11 hverdage.
  • 9. december 2024
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This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.

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