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Materials & Process Integration for MEMS

Bag om Materials & Process Integration for MEMS

Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781402071751
  • Indbinding:
  • Hardback
  • Sideantal:
  • 299
  • Udgivet:
  • 1. august 2002
  • Udgave:
  • 2002
  • Størrelse:
  • 235x155x19 mm.
  • Vægt:
  • 1400 g.
Leveringstid: 8-11 hverdage
Forventet levering: 25. november 2024

Beskrivelse af Materials & Process Integration for MEMS

Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

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