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Materials and Failures in MEMS and NEMS

Bag om Materials and Failures in MEMS and NEMS

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781119083603
  • Indbinding:
  • Hardback
  • Sideantal:
  • 432
  • Udgivet:
  • 28. september 2015
  • Størrelse:
  • 185x262x28 mm.
  • Vægt:
  • 934 g.
  • Ukendt - mangler pt..

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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