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Materials and Failures in MEMS and NEMS

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781119083603
  • Indbinding:
  • Hardback
  • Sideantal:
  • 432
  • Udgivet:
  • 28. september 2015
  • Størrelse:
  • 185x262x28 mm.
  • Vægt:
  • 934 g.
Leveringstid: Ukendt - mangler pt.

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

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