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Introduction to Microsystem Design

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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642268526
  • Indbinding:
  • Paperback
  • Sideantal:
  • 322
  • Udgivet:
  • 1. august 2013
  • Udgave:
  • 2011
  • Størrelse:
  • 235x155x19 mm.
  • Vægt:
  • 528 g.
  • 8-11 hverdage.
  • 20. november 2024

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Beskrivelse af Introduction to Microsystem Design

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.

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