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  5. Fundamental Electron Interactions with Plasma Processing Gases

Fundamental Electron Interactions with Plasma Processing Gases

af Loucas G. Christophorou, James K. Olthoff

indgår i Physics of Atoms and Molecules serien

Fundamental Electron Interactions with Plasma Processing Gases af Loucas G. Christophorou
Bag om Fundamental Electron Interactions with Plasma Processing Gases

The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781461347415
  • Indbinding:
  • Paperback
  • Sideantal:
  • 781
  • Udgivet:
  • 21. september 2012
  • Udgave:
  • 12004
  • Størrelse:
  • 234x156x40 mm.
  • Vægt:
  • 1205 g.
  • 8-11 hverdage.
  • 9. december 2024

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The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.

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