Bøger af Jie Cheng - plingboeger.dk

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Global LAnd Surface Satellite (GLASS) Products

af Shunlin Liang, Xiaotong Zhang, Zhiqiang Xiao, mfl.

574,95 kr.
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Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect

af Jie Cheng

1.154,95 - 1.313,95 kr.

This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material.
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