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  • Dry Etching for VLSI af A.J. van Roosmalen
    Dry Etching for VLSI
    af A.J. van Roosmalen, J.A.G. Baggerman & S.J.H. Brader
    1.681,95 kr.

    This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

    Se mere
  • Dry Etching for VLSI af A.J. van Roosmalen
    Dry Etching for VLSI
    af A.J. van Roosmalen, J.A.G. Baggerman & S.J.H. Brader
    1.744,95 kr.

    This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

    Se mere