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This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9780306438356
  • Indbinding:
  • Hardback
  • Sideantal:
  • 237
  • Udgivet:
  • 31. marts 1991
  • Udgave:
  • 1991
  • Størrelse:
  • 254x178x19 mm.
  • Vægt:
  • 1580 g.
  • 8-11 hverdage.
  • 30. november 2024

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Beskrivelse af Dry Etching for VLSI

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

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