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Fast Simulation of Electro-Thermal MEMS

- Efficient Dynamic Compact Models

af Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink

indgår i Microtechnology and MEMS serien

Fast Simulation of Electro-Thermal MEMS af Tamara Bechtold
Bag om Fast Simulation of Electro-Thermal MEMS

This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642070976
  • Indbinding:
  • Paperback
  • Sideantal:
  • 180
  • Udgivet:
  • 23. november 2010
  • Udgave:
  • 12007
  • Størrelse:
  • 156x234x10 mm.
  • Vægt:
  • 302 g.
  • 2-3 uger.
  • 25. november 2024
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This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

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