Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization

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2.836,95 kr.

Bag om Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization

Focusing on the physics of the annealing kinetics of the damaged layer, this book presents an overview of characterization techniques and a comparison of the information on annealing kinetics. It also provides basic knowledge of ion implantation-induced defects; focuses on physical mechanisms of defect annealing; and more.

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Sprog:
Engelsk

ISBN:
9780127521466

Forlag:
Elsevier Science Publishing Co Inc

Indbinding:
Hardback

Sideantal:
316

Udgivet:
12. juni 1997

Størrelse:
152x229x22 mm.

Vægt:
620 g.

Leveringstid: 2-3 uger.
Forventet levering: 11. december 2024

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Beskrivelse af Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization

Focusing on the physics of the annealing kinetics of the damaged layer, this book presents an overview of characterization techniques and a comparison of the information on annealing kinetics. It also provides basic knowledge of ion implantation-induced defects; focuses on physical mechanisms of defect annealing; and more.

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