Doping Engineering for Front-End Processing: Volume 1070

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Hardback
8-11 hverdage
939,95 kr.

Bag om Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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Sprog:
Engelsk

ISBN:
9781605110400

Forlag:
Materials Research Society

Indbinding:
Hardback

Sideantal:
319

Udgivet:
17. oktober 2008

Størrelse:
228x152x23 mm.

Vægt:
568 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 28. november 2024

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Beskrivelse af Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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