Doping Engineering for Front-End Processing: Volume 1070

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Paperback
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321,95 kr.

Bag om Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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Sprog:
Engelsk

ISBN:
9781107408548

Forlag:
Cambridge University Press

Indbinding:
Paperback

Sideantal:
336

Udgivet:
5. juni 2014

Størrelse:
152x229x18 mm.

Vægt:
45 g.

Leveringstid: 8-11 hverdage.
Forventet levering: 11. december 2024

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Forlænget returret til d. 31. januar 2025

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Beskrivelse af Doping Engineering for Front-End Processing: Volume 1070

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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