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Design and Manufacturing of Active Microsystems

indgår i Microtechnology and MEMS serien

Design and Manufacturing of Active Microsystems
Bag om Design and Manufacturing of Active Microsystems

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783642267383
  • Indbinding:
  • Paperback
  • Sideantal:
  • 444
  • Udgivet:
  • 19. april 2013
  • Udgave:
  • 2011
  • Størrelse:
  • 235x155x24 mm.
  • Vægt:
  • 694 g.
  • 8-11 hverdage.
  • 20. november 2024
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

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