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Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566

Bag om Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566

This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781558994737
  • Indbinding:
  • Hardback
  • Sideantal:
  • 281
  • Udgivet:
  • 10. februar 2000
  • Størrelse:
  • 157x234x23 mm.
  • Vægt:
  • 591 g.
  • 8-11 hverdage.
  • 7. december 2024
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This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included.

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