Bøger i Microsystems serien

Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques.

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.

The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.

Over the past two decades, technologies for microsystems fabrication have made considerable progress. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems.

Provides information on microfluidics, a research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. This book uses an example of micropump to illustrate a complete cycle in development of microfluidic devices which include literature review, designing and modelling, fabrication and testing.