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Introduction to Focused Ion Beam Nanometrology

Bag om Introduction to Focused Ion Beam Nanometrology

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9781643278469
  • Indbinding:
  • Hardback
  • Sideantal:
  • 104
  • Udgivet:
  • 1. oktober 2015
  • Størrelse:
  • 178x6x254 mm.
  • Vægt:
  • 367 g.
  • 2-3 uger.
  • 10. december 2024
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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

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