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Chemical-Mechanical Planarization of Semiconductor Materials

Bag om Chemical-Mechanical Planarization of Semiconductor Materials

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

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  • Sprog:
  • Engelsk
  • ISBN:
  • 9783540431817
  • Indbinding:
  • Hardback
  • Sideantal:
  • 428
  • Udgivet:
  • 26. januar 2004
  • Udgave:
  • 2004
  • Størrelse:
  • 155x235x26 mm.
  • Vægt:
  • 1760 g.
  • 8-11 hverdage.
  • 6. december 2024
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Beskrivelse af Chemical-Mechanical Planarization of Semiconductor Materials

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

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